Semi-Automatic Probe Station with mini-chamber (SEMI-MC series)


* Precise movement mechanism and stable control system make sure accurate positioning and smooth operation.
* High end image system secure image quality
* Build in mini-chamber to shield EMI and light
* Best combination of software and hardware achieve best performance.
* The major application is semiconductor, microelectronics, electrics, physics, materials, chemistry, opto-electrics, MEMS, bio-technology, aerospace … etc.
* It also could be applied for IC design/manufacture/package/testing, LED, LCD/OLED, LD/PD, PCB, FPC industries.



1. Anti-vibration Table

2. Thermal Chuck

3. Probe Card Holder– high measurement efficiency

4. Adapter – Connect with different instruments

5. Vacuum pump

6. Air compressor

7. Others