Semi-automatic Probe Station (SEMI series)


* Precise movement mechanism and stable control system make sure accurate positioning and smooth operation.
* High end image system secure image quality
* Best combination of software and hardware achieve best performance.
* The major application is semiconductor, microelectronics, electrics, physics, materials, chemistry, opto-electrics, MEMS, bio-technology, aerospace … etc.
* It also could be applied for IC design/manufacture/package/testing, LED, LCD/OLED, LD/PD, PCB, FPC industries.


1. Shielding Box – Light and EMI shielded

2. Anti-vibration Table

3. Thermal Chuck

4. Probe Card Holder– high measurement efficiency

5. Adapter – Connect with different instruments

6. Vacuum pump

7. Air compressor

8. Others