Semi-auto Mask Aligner (SA series)

Features:
‧High Quality Exposure Optics
‧High Resolution Capability
‧High Precision Alignment Stage
‧Wedge Error Compensation
‧Reasonable Price
‧PLC Control
‧Precise Gap Setting
‧Reliable and Stable
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Specs:

Light Source
* 350 Watt power supply
* Constant power and intensity control
* Wavelength : 350nm-450nm 
* 365 nm Intensity - 15-25 mW/cm2 
* Uniform Beam Size:  4" diameter
* Beam Uniformity: ±3% 
* Beam Angle < 2.0 deg
* Two sensors 365nm and 405nm for feedback control
Top Side Microscope System
* Dual CCD Camera Alignment System 
* Magnification from 80x to 500x
* Two sets of 19" color Monitors.
* LED coaxial illumination
* X travel : ±35mm, Y travel : ±20mm
 
Alignment Stage
* X, Y,  and Z adjustment 10mm
* θ rotation range :  ±5 deg
* Accuracy: 1um 
* With Proximity and Contact exposure mode 
* Wedge Error Compensation (WEC) 
 
Operating Interface
* PLC control .
* Exposure timer setting up to 999.9 sec.
* Switch for easy mask change.
* Emergency stop button.
 
Accessory
* Vacuum Mask Holder
* Vacuum Chuck
 
UV Lamp
*350/500W Hg Arc lamp
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