Specs:
Light Source |
* 350 Watt power supply |
* Constant power and intensity control |
* Wavelength : 350nm-450nm |
* 365 nm Intensity - 15-25 mW/cm2 |
* Uniform Beam Size: 4" diameter |
* Beam Uniformity: ±3% |
* Beam Angle < 2.0 deg |
* Two sensors 365nm and 405nm for feedback control |
Top Side Microscope System |
* Dual CCD Camera Alignment System |
* Magnification from 80x to 500x |
* Two sets of 19" color Monitors. |
* LED coaxial illumination |
* X travel : ±35mm, Y travel : ±20mm |
Alignment Stage |
* X, Y, and Z adjustment ≧ 10mm |
* θ rotation range : ±5 deg |
* Accuracy: 1um |
* With Proximity and Contact exposure mode |
* Wedge Error Compensation (WEC) |
Operating Interface |
* PLC control . |
* Exposure timer setting up to 999.9 sec. |
* Switch for easy mask change. |
* Emergency stop button. |
Accessory |
* Vacuum Mask Holder |
* Vacuum Chuck |
UV Lamp |
*350/500W Hg Arc lamp |