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Semi-auto Mask Aligner (SA series)
Features:
‧High Quality Exposure Optics
‧High Resolution Capability
‧High Precision Alignment Stage
‧Wedge Error Compensation
‧Reasonable Price
‧PLC Control
‧Precise Gap Setting
‧Reliable and Stable
‧High Quality Exposure Optics
‧High Resolution Capability
‧High Precision Alignment Stage
‧Wedge Error Compensation
‧Reasonable Price
‧PLC Control
‧Precise Gap Setting
‧Reliable and Stable
更多詳情
Specs:
| Light Source |
| * 350 Watt power supply |
| * Constant power and intensity control |
| * Wavelength : 350nm-450nm |
| * 365 nm Intensity - 15-25 mW/cm2 |
| * Uniform Beam Size: 4" diameter |
| * Beam Uniformity: ±3% |
| * Beam Angle < 2.0 deg |
| * Two sensors 365nm and 405nm for feedback control |
| Top Side Microscope System |
| * Dual CCD Camera Alignment System |
| * Magnification from 80x to 500x |
| * Two sets of 19" color Monitors. |
| * LED coaxial illumination |
| * X travel : ±35mm, Y travel : ±20mm |
| Alignment Stage |
| * X, Y, and Z adjustment ≧ 10mm |
| * θ rotation range : ±5 deg |
| * Accuracy: 1um |
| * With Proximity and Contact exposure mode |
| * Wedge Error Compensation (WEC) |
| Operating Interface |
| * PLC control . |
| * Exposure timer setting up to 999.9 sec. |
| * Switch for easy mask change. |
| * Emergency stop button. |
| Accessory |
| * Vacuum Mask Holder |
| * Vacuum Chuck |
| UV Lamp |
| *350/500W Hg Arc lamp |
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