* High reliability * High stability * Platen adjustable * Larger microscope travel range * Sample size could be 6-12 inch * The major application is semiconductor, microelectronics, electrics, physics, materials, chemistry, opto-electrics, MEMS, bio-technology, aerospace … etc. * It also could be applied for IC design/manufacture/package/testing, LED, LCD/OLED, LD/PD, PCB, FPC industries.