Double Sided Mask Aligner (DA Series)

Features:
‧High Quality Exposure Optics
‧High Resolution Capability
‧High Precision Alignment Stage
‧Double side Alignment Stage
‧Wedge Error Compensation
‧Reasonable Price
‧PLC Control
‧Precise Gap Setting
‧Reliable and Stable
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Specs:

Light Source
 
* 350 Watt Power Supply
* Constant Intensity Power Supply
* Wavelength : 350nm-450nm 
* 365 nm Beam Intensity : 15-25 mW/cm2 
* Uniform Beam Size:  4.0" Diameter 
* Beam Uniformity: ±3% over 4" Diameter
* Beam Angle < 2.0 deg
* 365nm/405nm sensors feedback control
 
Top Side Microscope System
* Dual lens Alignment System 
* Image Magnification : 50x-300x
* Two sets of 19" color Monitors.
* LED coaxial illumination
* Lens movement range XYZ : 20mm 
* Lens separation range 1.8" to 4"
* Best alignment accuracy: 1.0um
 
Bottom Side Microscope System
* Dual lens Alignment System 
* Image Magnification : 50x-300x
* LED coaxial illumination
* Lens movement range XYZ : 10mm 
* Image capture System
* Best alignment accuracy: 2.0um
 
Alignment Stage
* Including X, Y, θ and Z adjustment
* X, Y, Z  travel range : 10mm
* θ rotation range : 3 deg
* Proximity gap range : 0-3mm
* Accuracy: 1um 
* With Proximity and Contact exposure mode 
* Wedge Error Compensation (WEC) 
 
Operating Interface
* PLC control .
* Exposure timer setting up to 999.9 sec.
* Switch for easy mask change.
* Emergency stop button.
 
 Anti-vibration table
* Pneumatic Isolation
* Come with retractable casters
* Normal working pressure 4 kg
* Required air pressure 3~5 kg
* Natural frequency 2-3Hz
* Dimension W900xD700xH750mm
 
Accessory
* Mask Holder
* Bottom side Chuck
 
UV Lamp
*350/500W Hg Arc lamp
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