Specs:
Light Source |
* 350 Watt Power Supply |
* Constant Intensity Power Supply |
* Wavelength : 350nm-450nm |
* 365 nm Beam Intensity : 15-25 mW/cm2 |
* Uniform Beam Size: 4.0" Diameter |
* Beam Uniformity: ±3% over 4" Diameter |
* Beam Angle < 2.0 deg |
* 365nm/405nm sensors feedback control |
Top Side Microscope System |
* Dual lens Alignment System |
* Image Magnification : 50x-300x |
* Two sets of 19" color Monitors. |
* LED coaxial illumination |
* Lens movement range XYZ : 20mm |
* Lens separation range 1.8" to 4" |
* Best alignment accuracy: 1.0um |
Bottom Side Microscope System |
* Dual lens Alignment System |
* Image Magnification : 50x-300x |
* LED coaxial illumination |
* Lens movement range XYZ : 10mm |
* Image capture System |
* Best alignment accuracy: 2.0um |
Alignment Stage |
* Including X, Y, θ and Z adjustment |
* X, Y, Z travel range : 10mm |
* θ rotation range : 3 deg |
* Proximity gap range : 0-3mm |
* Accuracy: 1um |
* With Proximity and Contact exposure mode |
* Wedge Error Compensation (WEC) |
Operating Interface |
* PLC control . |
* Exposure timer setting up to 999.9 sec. |
* Switch for easy mask change. |
* Emergency stop button. |
Anti-vibration table |
* Pneumatic Isolation |
* Come with retractable casters |
* Normal working pressure 4 kg |
* Required air pressure 3~5 kg |
* Natural frequency 2-3Hz |
* Dimension W900xD700xH750mm |
Accessory |
* Mask Holder |
* Bottom side Chuck |
UV Lamp |
*350/500W Hg Arc lamp |